Operative Leitung
ABC-polishing
pg. 1082906.
DOI: 10.1117/12.2318549
Tilted wave interferometry for testing large surfaces
pg. 1082908.
DOI: 10.1117/12.2318573
Model based error separation of power spectral density artefacts in wavefront measurement
In: SPIE Optical Engineering + Applications Conference on Interferometry XIX
San Diego, CA, USA
Model based error separation of power spectral density artefacts in wavefront measurement
pg. 107490T.
DOI: 10.1117/12.2321106
Contribution of the phase transfer function of extended measurement cavities to mid spatial frequencies and the overall error budget
pg. 108290L.
DOI: 10.1117/12.2318711
Polishing tool and the resulting TIF for three variable machine parameters as input for the removal simulation
pg. 1032602.
DOI: 10.1117/12.2267415