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Prof. Dr.-Ing. Günther Benstetter

Mikroelektronik und Mikrosystemtechnik
Elektronische Bauelemente
Materialwissenschaften und angewandte Festkörperphysik
Qualitätssicherung und Zuverlässigkeitsanalytik

Fakultät Elektrotechnik und Medientechnik

Professor:innen

Studiendekan

E 208

0991/3615-513

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Publikationen

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Zeitschriftenartikel

X. Li
H. Fan
W. Liu
Y. Cui
C. Niu
W. Ni
Y. Zhang
S. Dai
Günther Benstetter
G. Lei
D. Liu

The heat flux and temperature distribution of W fuzz layers under fusion-relevant He/D ion irradiations

In: Journal of Nuclear Materials vol. 557 pg. 153319.

(2021)

DOI: 10.1016/j.jnucmat.2021.153319

Abstract anzeigen

The thermal diffusion of nanostructured W fuzz layers formed over W divertor targets due to fusion-relevant He+ irradiations remain unclear so far. By analyzing the collision process of energetic He+ and D+ ions in the fuzz layers, we have calculated the temperature distribution and heat flux of fuzz layers under low-energy (10–200 eV) and high-flux (1022–1025/m2⋅s) He+/D+ irradiations. Both the heat flux of fuzz layers and the temperature difference () between the top and bottom of fuzz layers are determined by the radius of W nanofibers, the thickness of fuzz layers, and the heat load over W targets. Our simulation predicts that under fusion-relevant He+/D+ irradiations at the energy of < 100 eV and the flux of < 1.0 × 1024/m2⋅s, is lower than 35 K when the heat load over the divertor varies in the range of < 10 MW/m2. Under the fusion-relevant He+/D+ irradiations, the heat flux of nanostructured fuzz layers is about 13–19% of the extremely high heat load over the W targets, indicating that the fuzz layers over W divertor targets can be very important for decreasing the extremely high heat load, such as type – I edge localized modes in the fusion device.

Elektrotechnik und Medientechnik
IQMA
NACHHALTIG

Zeitschriftenartikel

C. Niu
Y. Zhang
Y. Cui
X. Li
W. Liu
W. Ni
H. Fan
N. Lu
Günther Benstetter
G. Lei
D. Liu

Effect of temperature on the growth and surface bursting of He nano-bubbles in W under fusion-relevant He ion irradiations

In: Fusion Engineering and Design vol. 163 pg. 112159.

(2021)

DOI: 10.1016/j.fusengdes.2020.112159

Abstract anzeigen

Under fusion-relevant He+ irradiations, the W surface temperature is one of the most important parameters for controlling the fuzz growth over the W divertor targets, which is associated with the surface bursting of He nano-bubbles. Using He reaction rate model in W, we investigate the effect of temperature on the growth and surface bursting of He nano-bubbles under low-energy (100 eV) and large-flux (∼1022/m2⋅s) He+ irradiations. Increasing the irradiation temperature from 750 to 2500 K leads to a significant change in both the radius of He nano-bubbles and He retention. At an elevated temperature, He solute atoms prefer to rapidly diffuse into He nano-bubbles, thus affecting their concentration, growth and surface bursting. The decrease in He retention is attributed to an increase in the hop rate of solute He atoms in the W top layer, resulting in the significant He release from the W surface. The radius and density of He nano-bubbles calculated by our model are consistent with our experimental observation.

Elektrotechnik und Medientechnik
NACHHALTIG

Vortrag

Fabian Kühnel
Christoph Metzke
Günther Benstetter

Thermal conductivity measurements of thin films using 3ω method

In: 7. Tag der Forschung

Deggendorf

23.07.2020 (2020)

IQMA
Elektrotechnik und Medientechnik
NACHHALTIG

Vortrag

Günther Benstetter
R. Biberger
Alexander Hofer
H. Göbel

Intermittent-Contact Scanning Capacitance Analysis of Thin Dielectric Films and Semiconductor Devices . Invited Talk

In: 5th International Conference on Technological Advances of Thin Films & Surface Coatings

Harbin, China

Juli 2010 (2010)

Elektrotechnik und Medientechnik
IQMA

Vortrag

Günther Benstetter

Failure Analysis of Deep Sub-Micron Semiconductor Structures

Dalian University of Technology, Key-Labs Dalian, China

17.11.2003 (2003)

Elektrotechnik und Medientechnik
IQMA

Projekte

mehrere Projekte in den Bereichen Oberflächenanalytik, thermische und elektrische Charakterisierung neuer Materialien, >20 abgeschlossene Projekte

Labore

Elektronische Bauelemente, Raster-Sonden-Mikroskopie (RSM), Raster-Elektronen-Mikroskopie (REM) und Halbleiteranalytik

Kernkompetenzen

Material- und Oberflächenanalytik

* Raster-Elektronen-Mikroskopie & begleitende Methoden

Röntgenanalytik (EDX, WDX), Gefüge- und Strukturanalytik (EBSD), Mikro-Röntgenfluoreszenz (μ-XRF) Raster-Transmissions-Elektonenmikroskopie (STEM), korrelative Mikroskopie

* Raster-Sonden-Mikroskopie & Laser-Scanning Mikroskopie

kombinierte mechanische, magnetische, elektrische, thermische und chemische Mikro-Charakterisierung

* Thermische Charakterisierung

Qualitätssicherung und Zuverlässigkeitsanalytik

Fehler- und Ausfallanalytik, Wafer-Level-Zuverlässigkeitsanalytik, HL-Lebensdauer-Untersuchungen

Vita

Akademischer Werdegang

Berufung: Professor, Technische Hochschule Deggendorf, 1998 Promotion: Dr.-Ing., TU München, 1994 Studienabschluss: Dipl.-Ing. Elektrotechnik, 1989

Beruflicher Werdegang

1989-1994: Wissenschaftlicher Assistent, TU München 1994-1998: Siemens HL, IBM/Siemens/Toshiba DRAM – Projekt in Burlington, Vermont, USA seit 1998: Professor an der Technischen Hochschule Deggendorf, Fakultät Elektrotechnik und Medientechnik, Leiter des Insituts für für Qualitäts- und Materialanalysen (IQMA)

Sonstiges

Gutachter für internationale Forschungseinrichtungen und wissenschaftliche Zeitschriften